Title: Preparations and characterizations of ZnO nano-structural films and related SAW sensors

Author(s): WANG Yan;ZHANG Shuyi;YANG Yuetao;SHUI Xiuji

Affiliation(s): School of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, et al.

Abstract: ZnO nano-structural films are prepared by RF magnetron sputtering and the hydrothermal synthesis.The morphologies,crystal structures and chemical compositions of the ZnO nano-scaled films are analyzed by XRD,SEM and XPS,which show that the ZnO nanorods are well oriented along c-axis as the preparation conditions are suitably selected;and there are a lot of oxygen vacancies and adsorbed oxygen atoms in the ZnO nano-structural films,which are beneficial to be utilized as gas-sensing materials.Furthermore,SAW（Rayleigh wave and Love wave） sensors based on ZnO nano-structural films deposited on 128°YX-LiNbO3 and 36°YX-LiTaO3 piezoelectric substrates are fabricated and used for sensing hydrogen at room temperature.The results show that the Love wave sensors have better sensing properties,such as high sensitivities and superior performances.