LIU Jiansheng1,2 HE Shitang1
(1 Institute of Acoustics, Chinese Academy of Sciences Beijing 100080)
(2 Graduate University of Chinese Academy of Sciences Beijing 10080)
Received Nov. 8, 2006
Revised Jan. 18, 2007
Abstract Accurate solutions of acoustic waves in piezoelectric substrate and metal film as layered structure were obtained. Phase velocity, electromechanical coupling coefficient and static capacitance were calculated based upon the solutions. Chen and Haus' theory was used to analyze surface acoustic waves in shorten gratings with single finger every period and a reflection coefficient expression of one strip was presented. Parameters of aluminum on X-112 YLiTaoO3 and gold on ST-quartz were calculated. The results agreed well with those from Ken-ya Hashimoto's theory. The reflection coefficient of gold on ST-quartz was measured to verify the theoretical results.
PACS number: 43.60
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